Laboratory Facilities

The activities of the microSENSES Lab cover the general field of flexible-printed electronics, microsystems, sensors, microfluidics and embedded devices.

Equipment

Hoods

  • Two laminar flow hoods with HEPA filters (Cruma FL-2)
  • Two fume hoods (BIOBASE model FHΑ)

Micropatterning Equipment

  • Microlithography Mask-aligner system
  • Microlithography Spin Coater (SPS SPIN150i)
  • 3D Micropatterning and prototyping system (Colinbus Laboflex Pro 30/HF)
  • Stereolithography Printer (SLA) (Formlabs Form 3)
  • 3D Printer with dual head (RoboxDual)

Inspection Equipment

  • High precision Thermal IR Camera (Flir SC655)
  • Metrology Metallographic Microscope (Olympus MX51)
  • 3D Profilometer with White Light Interferometry (WLI) (Filmetrics Profilm3D)
  • 3D Video Microscope, with YSC Image Pro Ultra Software for digital video-image processing and measurement. (YSC Technologies 3D-VZ8)
  • Stereoscope

Printing Electronics Equipment

  • Drop-on-demand piezoelectric inkjet printer equipped with a Microdrop MD-K-140 nozzle (∅ 70 μm) and an MD-6020 head controller (Thetametrisis FR-DEPOSIT)
  • Screen Printing semi-automatic machine (Ever-bright, S-200HFC)

Full electrical characterization equipment

  • Keithley 2612 source-meter (2 channels)
  • Multimeters (Keithley 2000), equipped with multi-channel card (2000scan)
  • Triple Output Power Supply (Agilent Technologies E3631A)
  • Arbitrary Function Generator (Tektronix AFG3000)
  • Digital oscilloscope
  • Probe station equipped with four probes and embedded hot-pale

Auxiliary Equipment

  • Heating & Dry Heat Sterilization Oven (NUVE FN400)
  • High precision x-y motorized stages with integrated motor and controller System
  • Complete microfluidic characterization kit (microchannels, generic microfluidic platforms, microvalves, micropumps etc)
  • PCB Exposure Unit with integrated pump
  • Several commercial Sensor & Transducer systems

The Laboratory